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Answers
I'm guessing you're using Plain washer large grade A ISO 10673 (or normal or small). This is the table from ISO 10673 for the small size (the ID is the same for normal and large sizes as well). M5 is 4.55 mm nominal.
The reason for this is because washers from ISO 10673 are Plain washers for screw and washer assemblies, aka SEMS. I think you're actually looking for ISO 7089 or 7090. These are the more common ISO washers and have a 5.3 mm ID for the M5 size.